首页 > 论文 > Chinese Optics Letters > 18卷 > 2期(p:021403)

Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

Abstract

The laser-induced damage threshold of a calcium fluoride (CaF2) single crystal was obtained by a 193 nm ArF excimer laser. The damage morphology of the crystal was analyzed. The results showed that the surface of CaF2 single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved fragments. Laser-induced periodic stripe structures (LIPSS) appeared on the surface layer beneath the fragments that peeled off. The spacing of LIPSS was measured, and the formation mechanism of LIPSS was analyzed based on the interference model.

补充资料

DOI:

所属栏目:Lasers and Laser Optics

基金项目:This work was supported by the Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology (No. SKL2017KF05), the National Natural Science Foundation of China (No. 41627803), the Key Technology Projects, and the Natural Science Foundation of Anhui Province (No. 1908085MF222).

收稿日期:2019-07-30

录用日期:2019-11-14

网络出版日期:2019-12-24

作者单位    点击查看

Jingzhen Shao:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China
Xu Liang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China
Libing You:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Ning Pan:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Ying Lin:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Shimao Wang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Zanhong Deng:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
Xiaodong Fang:Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, ChinaAdvanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
Xi Wang:Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, ChinaState Key Laboratory of Pulsed Power Laser Technology, National University of Defense Technology, Hefei 230037, China

联系人作者:Xiaodong Fang(xdfang@aiofm.ac.cn); Xi Wang(eastangus@126.com);

备注:This work was supported by the Open Research Fund of the State Key Laboratory of Pulsed Power Laser Technology (No。 SKL2017KF05), the National Natural Science Foundation of China (No。 41627803), the Key Technology Projects, and the Natural Science Foundation of Anhui Province (No。 1908085MF222)。

【1】S. SakuragiS. Sakuragi. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Proc. SPIE. 5647, (2005).

【2】J. T. Mouchovski, K. A. Temelkov, N. K. Vuchkov and N. V. Sabotinov. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. J. Phys. D Appl. Phys. 40, (2007).

【3】J. WangJ. Wang. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Proc. SPIE. 9628, (2015).

【4】

【5】

【6】X. Liu, K. Yang, S. Zhao, T. Li, C. Luan, X. Guo, B. Zhao, L. Zheng, L. Su, J. Xu and J. Bian. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Opt. Lett. 42, (2017).

【7】W. Ma, L. Su, X. Xu, J. Wang, D. Jiang, L. Zheng, X. Fan, C. Li, J. Liu and J. Xu. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Opt. Mater. Express. 6, (2016).

【8】L. Zhang, T. Guo, Y. Ren, Y. Cai, M. D. Mackenzie, A. K. Kar and Y. Yao. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Opt. Commun. 441, (2019).

【9】B. H. Babu, T. Billotte, C. Lyu, B. Poumellec, M. Lancry and X. Hao. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. OSA Continuum. 2, (2019).

【10】X. Jiang, D. Liu, L. Ji, S. Tang, Y. Guo, B. Zhu, Y. Gao and Z. Lin. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Proc. SPIE. 9532, (2015).

【11】M. Ehrhardt, G. Raciukaitis, P. Gecys and K. Zimmer. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. A. 101, (2010).

【12】Z. Yu, H. He, H. Qi, Z. Fang and D. Li. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Chin. Phys. Lett. 30, (2013).

【13】M. Azumi and E. Nakahata. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Proc. SPIE. 9632, (2015).

【14】C. Li, X. Kang, W. Han, W. Zheng and L. Su. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Surf. Sci. 480, (2019).

【15】J. Reif, O. Varlamova and F. Costache. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. A. 92, (2008).

【16】H. LeeH. Lee. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. J. Mech. Sci. Technol. 21, (2007).

【17】. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. International Organization for Standardization. (2011).

【18】S. Gogoll, E. Stenzel, M. Reichling, H. Johansen and E. Matthias. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Surf. Sci. 96–98, (1996).

【19】P. Lorenz, M. Ehrhardt and K. Zimmer. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Surf. Sci. 265, (2013).

【20】M. Reichling, J. Sils, H. Johansen and E. Matthias. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. A. 69, (1999).

【21】Y. Kawaguchi, A. Narazaki, T. Sato, H. Niino and A. Yabe. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Proc. SPIE. 4637, (2002).

【22】M. BirnbaumM. Birnbaum. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. J. Appl. Phys. 36, (1965).

【23】D. Emmony, R. Howson and L. Willis. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. Lett. 23, (1973).

【24】P. M. Fauchet and A. E. Sigman. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. Lett. 40, (1982).

【25】J. F. Young, J. S. Preston, H. M. Van Driel and J. E. Sipe. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Phys. Rev. B. 27, (1983).

【26】F. Keilmann and Y. H. Bai. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. A. 29, (1982).

【27】N. Baltzer and M. Von Allmen. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. Lett. 43, (1983).

【28】Y. F. Lu, J. J. Yu and W. K. Chol. Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser. Appl. Phys. Lett. 71, (1997).

引用该论文

Jingzhen Shao, Xu Liang, Libing You, Ning Pan, Ying Lin, Shimao Wang, Zanhong Deng, Xiaodong Fang, Xi Wang, "Laser-induced damage and periodic stripe structures of a CaF2 single crystal by an ArF excimer laser," Chinese Optics Letters 18(2), 021403 (2020)

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF

极速赛车登陆 极速赛车太假 环球彩票计划群 千禧彩票计划群 秒速赛车是真的吗 彩票监察计划群 百分百彩票计划群 吉林快3计划 东方彩票计划群 CC彩票计划群